DuPont™ Kalrez® Parts for the Semiconductor Industry
Trust the semiconductor products that have been used successfully in highly aggressive sealing environments for over three decades. Kalrez® perfluoroelastomer (FFKM) parts feature excellent thermal and chemical stability and have been formulated and processed to meet the unique requirements of wafer processing.
These Kalrez® molded o-rings and custom seals are made using speciality products and ultrapure processing* for the semiconductor industry.
* Ultrapure processing standard for all semiconductor product grades; must be specified for Kalrez® 6375UP and 7075UP
Kalrez® Semiconductor Product Selection Guide
Process Type | Typical Seal Temperature | Typical Process Environment | Suggested Products* | Comments | Typical Applications | |
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Plasma Processes![]() | PECVD/ALD/ HDPCVD | 250°C | TMS, DEMS, TEOS, SiH4, C3H6, NH3, SiF4, O2, N2O, NF3 | 9100 | 9100 – Low erosion rate and ultra-low particle generation 9500 – Excellent resistance to ozone, ammonia, steam and plasma radicals. 8705 – Excellent resistance to UV light 9300 – Excellent resistance to plasma ions and radicals 8002 – Excellent resistance to oxygen plasma | Dynamic: • Door seals • Gate valves • Pendulum valves Static: • Chamber lid seals • Exhaust valves • Gas inlet/outlet/mixing block seals • Window seals • Center ring seals Other: • Seals for heat-traced lines in sub-fab foreline and exhaust systems* |
PECVD Curing Process | 200°C | O3, UV light | 8705* Quartz Window Seal 9500* All other seal locations |
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SACVD / FCVD | 280°C | TEP, TEBO, TEOS, O3, NF3, NH3 | 9500 | |||
Ash/Strip | 200°C | O2, CF4, CHF3, NH3, Water Vapor, Forming Gas | 8002 | |||
Dielectric (Oxide) Etch | 200°C | CF4, C3F8, CHF3, SF6,O2, H2, | 9300 | |||
Conductor (Poly/Metal) Etch | 200°C | CF4, CHF3, HBr, BCl3, CCl4, Cl2 | 9100 | |||
Thermal Processes![]() | ALD LPCVD | 280°C | SiH4, HF, F2, Cl2, NF3, H2O Vapor, O2 | 8900 | 8900 – Excellent thermal stability and very low outgassing properties. 7075UP – Excellent resistance to ClF3. 8575 – Low IR absorption due to white color. | • Quartz chamber seal • Fittings • Center ring • Plenum seals |
Metal CVD | 280°C | Organic precursors, WF6, TiCl4, ClF3, NF3 | 7075UP | |||
Oxidation Diffusion | 300°C | N2, O2, H2O, HCl, Cl2, O3 | 8900 8575/8475 |
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Lamp Anneal RTP | 300°C | Infrared light | 8575 | |||
Wet Processes![]() | Wafer Prep | 125°C | UPDI, Piranha, SC-1, SC-2, O3, HF (49%) | 6375UP | 6375UP – General purpose product for all wet process applications. | • Door/lid seals • Drain seals • Seals for chemical containers • Fittings • Seals for filters/ connectors • Flow meters |
Etching | 180°C | HNO3, HF, H2O, H3PO4, HNO3 | ||||
Photolithography | 125°C | H2SO4 + Oxidant, Organic Acids, nMP | ||||
Stripping | 125°C | nMP/Alkanolamine Hydroxlamine | ||||
Copper Plating | 100°C | CuSO4 Solution H2SO4, H2O2 |
* Please consult a Kalrez® Application Engineer to assess performance fit in your application. Please refer to the Kalrez® Application Guide
(www.kalrez.com) for specific chemical compatibility ratings for Kalrez® products.
C&B Equipment Is a Licensed Kalrez® Distributor
C&B Equipment is proud to be a Licensed Distributor of Kalrez parts®. The superior performance of these seals helps you increase your uptime—the mission that guides everything we do. Contact us today for your standard or custom Kalrez® parts.
Get the Right Fit.
Contact Our Kalrez® Seal Expert.

Ben Brocker, Kalrez® Expert