Kalrez Semiconductor Products

DuPont™ Kalrez® Parts for the Semiconductor Industry

Trust the semiconductor products that have been used successfully in highly aggressive sealing environments for over three decades. Kalrez® perfluoroelastomer (FFKM) parts feature excellent thermal and chemical stability and have been formulated and processed to meet the unique requirements of wafer processing.

These Kalrez® molded o-rings and custom seals are made using speciality products and ultrapure processing* for the semiconductor industry.

* Ultrapure processing standard for all semiconductor product grades; must be specified for Kalrez® 6375UP and 7075UP

Kalrez® Semiconductor Product Selection Guide

	Process Type	Typical Seal Temperature	Typical Process Environment	Suggested Products*	Comments	Typical Applications
Plasma Processes	PECVD/ALD/ HDPCVD	250°C	TMS, DEMS, TEOS, SiH4, C3H6, NH3, SiF4, O2, N2O, NF3	9100	9100 – Low erosion rate and ultra-low particle generation 9500 – Excellent resistance to ozone, ammonia, steam and plasma radicals. 8705 – Excellent resistance to UV light 9300 – Excellent resistance to plasma ions and radicals 8002 – Excellent resistance to oxygen plasma	Dynamic: • Door seals • Gate valves • Pendulum valves Static: • Chamber lid seals • Exhaust valves • Gas inlet/outlet/mixing block seals • Window seals • Center ring seals Other: • Seals for heat-traced lines in sub-fab foreline and exhaust systems*
	PECVD Curing Process	200°C	O3, UV light	8705* Quartz Window Seal 9500* All other seal locations
	SACVD / FCVD	280°C	TEP, TEBO, TEOS, O3, NF3, NH3	9500
	Ash/Strip	200°C	O2, CF4, CHF3, NH3, Water Vapor, Forming Gas	8002
	Dielectric (Oxide) Etch	200°C	CF4, C3F8, CHF3, SF6,O2, H2,	9300
	Conductor (Poly/Metal) Etch	200°C	CF4, CHF3, HBr, BCl3, CCl4, Cl2	9100
Thermal Processes	ALD LPCVD	280°C	SiH4, HF, F2, Cl2, NF3, H2O Vapor, O2	8900	8900 – Excellent thermal stability and very low outgassing properties. 7075UP – Excellent resistance to ClF3. 8575 – Low IR absorption due to white color.	• Quartz chamber seal • Fittings • Center ring • Plenum seals
	Metal CVD	280°C	Organic precursors, WF6, TiCl4, ClF3, NF3	7075UP
	Oxidation Diffusion	300°C	N2, O2, H2O, HCl, Cl2, O3	8900 8575/8475
	Lamp Anneal RTP	300°C	Infrared light	8575
Wet Processes	Wafer Prep	125°C	UPDI, Piranha, SC-1, SC-2, O3, HF (49%)	6375UP	6375UP – General purpose product for all wet process applications.	• Door/lid seals • Drain seals • Seals for chemical containers • Fittings • Seals for filters/ connectors • Flow meters
	Etching	180°C	HNO3, HF, H2O, H3PO4, HNO3
	Photolithography	125°C	H2SO4 + Oxidant, Organic Acids, nMP
	Stripping	125°C	nMP/Alkanolamine Hydroxlamine
	Copper Plating	100°C	CuSO4 Solution H2SO4, H2O2

C&B Equipment Is a Licensed Kalrez® Distributor

C&B Equipment is proud to be a Licensed Distributor of Kalrez parts®. The superior performance of these seals helps you increase your uptime—the mission that guides everything we do. Contact us today for your standard or custom Kalrez® parts.